Although Skywalker was a star pupil of the Jedi Order, he also had a tenuous relationship with the Council before the events of Revenge of the Sith. ... The younglings served as a reminder that Skywalker never really fit in with the Jedi Order, which likely influenced his decision to kill them.

Did any Younglings survive Anakin?

Baby Yoda spent time on Coruscant under the watch of the Jedi Order before the end of the Clone Wars, according to Ahsoka. ... Although the end of the Clone Wars included Anakin Skywalker slaughtering Jedi younglings, Baby Yoda was spared from this massacre due to this rescue.

Was Vader supposed to kill the younglings?

In Star Wars: Episode III - Revenge of the Sith, Darth Vader slaughtered Younglings to cement his position as Palpatine's apprentice - but he was still haunted by this after The Empire Strikes Back.