In just one click, we measure thin-film thickness by analyzing how the film reflects light. By measuring light not visible to the human eye, films as thin as 1nm and as thick as 3mm can be measured.
What does the ellipsometer check?
Ellipsometry measures the change of polarization upon reflection or transmission and compares it to a model. It can be used to characterize composition, roughness, thickness (depth), crystalline nature, doping concentration, electrical conductivity and other material properties.
How is film thickness measured?
The thickness of a single-layer film can be measured easily using a spectrophotometer. Note, however, that this is possible only for film thickness in a range of approximately 0.3 to 60 μm, and that the refractive index of the film material is required for measurement.