Energy-dispersive X-ray spectroscopy (EDX) is a surface analytical technique where an electron beam hits the sample, exciting an electron in an inner shell, causing its ejection and the formation of an electron hole in the electronic structure of the element.

How does EDS analysis work?

The EDS technique detects x-rays emitted from the sample during bombardment by an electron beam to characterize the elemental composition of the analyzed volume. ... When the sample is bombarded by the SEM's electron beam, electrons are ejected from the atoms comprising the sample's surface.

What is the working principle of EDX?

The way EDX analysis works is that the electron beam hits the inner shell of an atom, knocking off an electron from the shell, while leaving a positively charged electron hole. When the electron is displaced, it attracts another electron from an outer shell to fill the vacancy.