D. Photolithography is one of the most important and easiest methods of microfabrication, and is used to create detailed patterns in a material. In this method, a shape or pattern can be etched through selective exposure of a light sensitive polymer to ultraviolet light.

Why lithography is one of the most critical technology in semiconductor fabrication?

Lithography is often considered the most critical step in IC fabrication, for it defines the critical dimension-the most difficult dimension to control during fabrication (e.g., polysilicon gate length)-of the device. ... It is estimated that lithography accounts for nearly one-third of the total wafer fabrication cost.

Why lithography is used in semiconductor manufacturing?

Photolithography is a process used in microfabrication to transfer geometric patterns to a film or substrate. Geometric shapes and patterns on a semiconductor make up the complex structures that allow the dopants, electrical properties and wires to complete a circuit and fulfill a technological purpose.