Backscattered electrons (BSE) consist of high-energy electrons originating in the electron beam, that are reflected or back-scattered out of the specimen interaction volume by elastic scattering interactions with specimen atoms.

What are backscattered electrons and secondary electrons?

Backscattered electrons are reflected back after elastic interactions between the beam and the sample. Secondary electrons, however, originate from the atoms of the sample. They are a result of inelastic interactions between the electron beam and the sample.

How are backscattered electrons generated?

Produced through an elastic scattering interaction with the atoms in the sample that results in the primary electron being re-emitted from the specimen. The electron is said to have backscattered (or reflected back) from the sample. ... Backscattered electrons usually have energy in the kV range.