Accuracy is how close a stage can position to the actual (true) value. Repeatability is a measure of the stage's ability to sequentially position to the same target value. ... Accuracy is also referred to as trueness. Other terms for repeatability are reproducibility or - slightly confusing - precision.

Is accuracy same as repeatability?

Accuracy (Figure 1) is a measure of how close an achieved position is to a desired target position. Repeatability (Figure 2) is a measure of a system's consistency to achieve identical results across multiple tests.

Does precision refer to repeatability?

The precision of a measurement system, related to reproducibility and repeatability, is the degree to which repeated measurements under unchanged conditions show the same results. ... A measurement system is considered valid if it is both accurate and precise.