A cryopump or a "cryogenic pump" is a vacuum pump that traps gases and vapours by condensing them on a cold surface, but are only effective on some gases. The effectiveness depends on the freezing and boiling points of the gas relative to the cryopump's temperature.
What is a cryo pump used for?
What is a cryopump? A cryopump is vacuum pump that traps gases and vapors by condensing them on a cold surface. For efficient evacuation under ultra-high vacuum, the vapor pressure for condensation, or the equilibrium pressure for adsorption must be less than 10-8Pa. Figure 1 shows vapor pressures of different gases.
How do you start a cryogenic pump?
Start Up（Rough Pumping and Cooldown）
（1）Turn ON the main power. （2）Circulate cooling water for water-cooling type compressor unit. （3）Rough pump inside the cryopump to 40Pa. (Do not rough pump to 13 to 20Pa or below because it may cause oil contamination by oil backflow of rotary pump.
